Conductive transparent layers and method for their production

US6905776B1 · kind B1 · utility

Assignee

• BPS Alzenau GmbH · DE

Inventors

• Johannes Stollenwerk · Gelnhausen, DE
• Andreas Klöppel · Glauburg, DE
• Marcus Bender · Hanau, DE

Key dates

• Filing date: Oct 11, 2000
• Grant date: Jun 14, 2005
• Expiry date: Jan 5, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31678
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

On a glass substrate, a base layer of indium cerium oxide is deposited, and on this a thin copper-containing silver layer, both produced by means of DC sputtering. On top there is another indium cerium oxide layer, which is produced by means of AC-superimposed DC sputter deposition. This layer system boasts very low surface resistivity combined with high transparency in the visible part of the spectrum, which means it has a high Haacke quality factor.