Laser processing apparatus, mask for laser processing, and method for making the mask
US6906282B2 · kind B2 · utility
1Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 9, 2001 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Mar 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mask 10 comprises a mask member layer 12 having a laser processing pattern and comprising a metallic material and first and second substrate members 11 and 13 holding the mask member on two faces thereof and comprising a material that transmits laser light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.