Lens for a scanning electron microscope
US6906335B2 · kind B2 · utility
1Cited by
3References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 2, 2001 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Oct 24, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.