Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors
US6906395B2 · kind B2 · utility
8Cited by
18References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 22, 2002 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Aug 22, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are located external to the hermetic seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.