Patent · US Expired

Mask used for exposing a porous substrate

US6906423B1 · kind B1 · utility

8Cited by
9References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 26, 2003
Grant dateJun 14, 2005
Priority date
Expiry dateSep 26, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/12042
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A mask used for exposing a porous substrate to form a first region and a second region, the first region being filled with a conductive material piercing through the entire thickness of the porous substrate to constitute an interfacial conductive portion, the second region being filled with a conductive material not piercing the entire thickness of the porous substrate to constitute a non-interfacial conductive portion. The mask includes a first light-transmitting region for exposing the first region, and a second light-transmitting region for exposing the second region, said second light-transmitting region including an aggregation of fine patterns of which an average aperture ratio is not more than 50% of an average aperture ratio of the first light-transmitting region and a size of said fine patterns of the second light-transmitting region being in the range of 0.1 μm to 10 μm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.