Inspection of surfaces
US6906803B2 · kind B2 · utility
1Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2001 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | May 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for the inspection of surfaces, notably for the inspection of a surface of a semiconductor (14), which device comprises at least one laser light source (1) and a detector for detecting the light (13) that is reflected from the surface (10) to be inspected; the device also includes at least one mode filter (15; 15.1) for filtering the reflected light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.