Micro-mirror element
US6906849B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2004 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Sep 23, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.