Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
US6908778B2 · kind B2 · utility
1Cited by
6References
6Claims
0Family size
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Key dates
| Filing date | Sep 2, 2003 |
| Grant date | Jun 21, 2005 |
| Priority date | — |
| Expiry date | Sep 2, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.