Miniaturized terahertz radiation source

US6909104B1 · kind B1 · utility

Assignee

• NaWoTec GmbH · DE

Inventors

• Hans Koops · Ober-Ramstadt, DE
• Tobias Bauer · Königstein, DE
• Wolfgang Elsässer · Seeheim-Jugenheim, DE
• Filip Floreani · Darmstadt, DE
• Hartmut G. Roskos · Kronberg, DE

Key dates

• Filing date: May 10, 2000
• Grant date: Jun 21, 2005
• Expiry date: May 10, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J25/00
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A miniaturized terahertz radiation source based on the Smith-Purcell effect is provided, in which, from a focused electron source, a high-energy bundle of electrons is transmitted at a defined distance over a reflection diffraction grating composed of transversely disposed grating rods, so that, in response to oscillating image charges, electromagnetic waves of one wavelength are emitted, the wavelength being adjustable as a function of the periodicity of the lines and of the electron velocity. The elements of the radiation source, such as field emitter (1), electrostatic lens (4), beam deflector (5), grating (7) of metal, and a second anode (8), are integrated on a semiconductor chip using additive nanolithographic methods. The field electron source is constructed to project, as a wire, out of the surface, using additive nanolithography, and is made of readily conductive material having stabilizing series resistance. The wire is constructed, using computer-controlled deposition lithography, in a straight or curved, free-standing design. In its surface area, the base material bears a conductor structure for the electrical terminals and connections (2), including controllable voltag…