Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon
US6909237B1 · kind B1 · utility
11Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2002 |
| Grant date | Jun 21, 2005 |
| Priority date | — |
| Expiry date | Jul 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2240/10
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive α-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf α-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf α-mode plasmas for various materials processing applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.