Method and apparatus for measuring the geometrical structure of an optical component in transmission
US6909498B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2001 |
| Grant date | Jun 21, 2005 |
| Priority date | — |
| Expiry date | Dec 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the geometrical structure of an optical component (2) in transmission, comprises illuminating the optical component by means of a first incident beam (8, 10), the wavefront of which is known. After the first beam is transmitted by the optical component, its wavefront is measured by deflectometry (16, 18). The optical component is then illuminated by a second incident beam (12, 14), the wavefront of which is known. After the second beam is transmitted by the optical component, its wavefront is measured by deflectometry (16, 18). The geometrical structure of the optical component is then calculated from the measured wavefronts.Measuring light transmitted in two distinct optical configurations allows a calculation by optimizing the two surfaces of the component, without prior knowledge of one of the surfaces. The first and second beams may be different and may illuminate the same surface of the component; thus it is possible to use identical beams and to illuminate each surface of the component in succession.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.