Patent · US Expired

Turbomolecular vacuum pump with the rotor and stator vanes

US6910861B2 · kind B2 · utility

3Cited by

5References

11Claims

0Family size

Assignee

LEYBOLD VAKUUM GmbH · DE

Inventors

Christian Beyer · Freiberg, DE
Heinz Englander · Linnich, DE
Peter Klingner
Martin Laerbusch · Eschweiler, DE

Key dates

Filing date	Nov 15, 2001
Grant date	Jun 28, 2005
Priority date	—
Expiry date	Nov 15, 2021

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF05D2250/70
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation. At least a part of the rotor vanes (6) have a rear side (12) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes (6) have a front side (11), which is concave on the suction side and convex on the delivery side.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.