X-Y stage system with onboard linear motor
US6911747B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2003 |
| Grant date | Jun 28, 2005 |
| Priority date | — |
| Expiry date | Dec 19, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23Q5/28
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An X-Y stage system is disclosed which is easy to assemble and compact or slim in construction. Both the X- and Y-stages are allowed to move without getting influence from the magnetic force created by the field magnets. The X-Y stage system has an X-stage movable relatively to a bed through a linear motion guide unit in an X-direction, and a Y-stage movable relatively to the X-stage through another linear motion guide unit in a Y-direction. The linear motors to force the X- and Y-stages are composed of paired field magnets of secondary side held to the bed and the Y-stage, respectively, and armature windings of primary side supported on the opposite sides of the X-stage in a way lying in clearances between the opposing field magnets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.