Cryopump piston position tracking
US6912862B2 · kind B2 · utility
1Cited by
4References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2003 |
| Grant date | Jul 5, 2005 |
| Priority date | — |
| Expiry date | Jul 14, 2023 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B2309/001
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved cryogenic compressor with piston position sensing is disclosed. Precision optical encoders using incremental or absolute encoding are incorporated into a compressor to allow for accurate position sensing of moving elements within the compressor. Appropriate electronic circuitry is used to interpret the position data to allow the user modify the frequency and stroke of the piston within the compressor. The invention may be used in systems with multiple compressor pistons or for position data for balance weights or displacers in a cryogenic refrigeration system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.