Patent · US Expired

Process for reducing the resistivity of an electrically conductive layer

US6913790B2 · kind B2 · utility

1Cited by

6References

9Claims

0Family size

Assignee

Plansee Aktiengesellschaft · AT

Inventors

Arno Schintlmeister · Reutte, AT
Peter Wilhartitz · Reutte, AT

Key dates

Filing date	Aug 27, 2002
Grant date	Jul 5, 2005
Priority date	—
Expiry date	Jan 18, 2023

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/76888
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The resistivity of an electrically conductive layer of molybdenum or a molybdenum alloy is reduced. For that purpose, a MoO2 layer is formed on the surface of the electrically conductive layer. The sheet resistivity can thereby be reduced in the order of magnitude of 10% to 15%.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.