Polyalkylene oxide porogens having hyper-branches and low dielectric-constant insulators using them
US6914147B2 · kind B2 · utility
3Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2002 |
| Grant date | Jul 5, 2005 |
| Priority date | — |
| Expiry date | Apr 9, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08J2383/04
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The present invention relates to polyalkylene oxide porogens having hyper-branches and low dielectric-constant insulators using them. More particularly, the present invention relates to polyalkylene oxide porogens having hyper-branches expressed by the following formula (1), where the polyalkylene oxide porogen has a center molecular (D) having branches (W), and low dielectric-constant insulators having nanopores prepared by coating a mixture of the porogen and a high heat-resistant resin such as polysilsesquioxane and thermal treating the coated substrate at a temperature effective to degrade the porogen.DY—W)l (1)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.