Patent · US Expired

Method and device for coating substrates

US6916512B2 · kind B2 · utility

1Cited by

7References

11Claims

0Family size

Assignee

Schott Glas · DE

Inventors

Burkhard Danielzik · Ingelheim am Rhein, DE
Markus Kuhr · Wollstein, DE
Wolfgang Moehl · Worms, DE

Key dates

Filing date	Mar 1, 2001
Grant date	Jul 12, 2005
Priority date	—
Expiry date	Apr 27, 2021

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/511
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The method for coating plural surfaces on multiple sides of a substrate, especially a lens, includes launching microwave outputs into a microwave reactor at respective microwave launch sites; selecting respective microwave outputs to be greater than or equal to thresholds at which corresponding plasmas having a reduced permeability to microwave radiation arise in the microwave reactor; setting distances between the plural surfaces and microwave launch sites greater than microwave penetrations depths in the plasmas; placing respective dielectric tuning elements in microwave fields formed from the microwave outputs at the launch sites; and adapting the shapes of the dielectric tuning elements to the plural surfaces to be coated, so that plasma inhomogeneities are corrected and coatings with a uniformity of ±1% are formed on the plural surfaces.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.