Flow detector with lead-throughs and method for its production
US6920786B2 · kind B2 · utility
7Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2003 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | Aug 21, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow detector comprises at least two housing parts with a semiconductor chip having an integrated flow sensor arranged between the housing parts. An opening is provided in one of the housing parts and at least one metal pin extends through the opening and forms an electrical lead-through. A hardened filler material is used for sealing the lead-through against the walls of the opening. This construction provides a well sealed cavity for the fluid to be measured and can be manufactured easily.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.