High precision mirror, and a method of making it
US6921177B2 · kind B2 · utility
14Cited by
10References
29Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2003 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | May 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror includes: a substrate having a surface; and a thin-film finish layer provided over the surface of the substrate and having on a side thereof opposite from the substrate a surface with a polished finish. According to a different aspect of the invention, a method of making a mirror includes: providing a substrate having a surface thereon; forming a thin-film finish layer over the surface of the substrate using thin-film techniques, the finish layer having a surface on a side thereof opposite from the substrate; and polishing the surface of the finish layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.