Raised on-chip inductor and method of manufacturing same
US6922127B2 · kind B2 · utility
9Cited by
8References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2002 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | Feb 26, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49071
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A raised on-chip planar inductor. An inductor is fabricated on a substrate. The inductor, except for an anchoring extremity, is lifted from the substrate, preferably by application of a magnetic field to a magnetic layer formed on the inductor. The lifting of the inductor deforms a plastic bending region. After the magnetic field is removed, the inductor remains raised with respect to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.