Patent · US Expired

Microscale out-of-plane anemometer

US6923054B2 · kind B2 · utility

14Cited by
7References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 17, 2003
Grant dateAug 2, 2005
Priority date—
Expiry dateJan 17, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49083
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A microscale out-of-plane thermal sensor. A resistive heater is suspended over a substrate by supports raised with respect to the substrate to provide a clearance underneath the resistive heater for fluid flow. A preferred fabrication process for the thermal sensor uses surface micromachining and a three-dimensional assembly to raise the supports and lift the resistive heater over the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.