Physical quantity sensor having beam
US6923061B2 · kind B2 · utility
8Cited by
1References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2004 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Mar 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed electrode supported on the substrate. The beam is movable in a vertical direction of the substrate so that the physical quantity in the vertical direction is detectable. The sensor can be minimized, and has excellent output characteristics. Further, a manufacturing cost of the sensor is small.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.