Sensor

US6923062B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Jochen Franz · Reutlingen, DE
• Oliver Kohn · Reutlingen, DE
• Frank Henning · Reutlingen, DE
• Matthias Maute · Lörrach, DE

Key dates

• Filing date: Feb 20, 2002
• Grant date: Aug 2, 2005
• Expiry date: Feb 20, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0831
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes an unsupported a seismic mass, a spring system having at least one spring, the seismic mass being connected to the substrate through the spring system, and an overload protection to limit the deflection of the spring system and the seismic mass in at least one direction, and an arrangement for detecting the deflections of the spring system and the seismic mass, whereby the impact forces may be reduced to prevent conchoidal breaks and resulting incipient damage to the sensor structure, as well as formation of particles. To that end, at least one two-dimensional stop for at least one moving part of the sensor structure is provided as overload protection. Alternatively or in addition thereto, at least one spring or resilient stop for at least one moving part of the sensor structure is provided as overload protection.