Laser processing method to a class substrate and an optical diffraction element obtained thereby, and a method for manufacturing optical elements
US6924457B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Nov 27, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2457
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
In a laser processing method for accurately forming a convexo-concave structure on the surface of a glass substrate, a periodic optical intensity distribution of a laser beam is obtained by an interference between diffracted light beams of +1 degree and −1 degree emitted from a phase mask, onto which the laser beam is irradiated, in the vicinity of the emission side of the phase mask, and a glass substrate, on which a thin film is formed, is set in the area where the periodic optical intensity distribution is provided. As a result, the thin film is evaporated or ablated depending on the periodic optical intensity, thereby a diffraction grating, which has the same period as that of the varying optical intensity, is formed on the glass substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.