Method and system for establishing the cleanliness of a device
US6924477B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2003 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Mar 28, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/40
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for establishing the cleanliness of a device by performing a test is described. The system includes an ion mobility spectrometer to measure target signal strengths, and to measure n2≧1 test signal strengths of a device sample. The system also includes a statistics module to obtain a value of a statistical confidence-level parameter that is associated with a particular confidence level, and a pass range module to obtain a pass range of signal strengths from the value of the statistical confidence-level parameter and the n1 target signal strengths. The system also includes an averaging module to obtain an average test signal strength from the n2 test signal strengths, and a results module to determine that the device passes the test, indicating that the device is significantly clean to within the particular confidence level, if the average test signal strength lies in the pass range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.