Patent · US Expired

Microscope apparatus

US6924929B2 · kind B2 · utility

7Cited by
4References
18Claims
0Family size

Assignees

Inventors

Key dates

Filing dateMar 28, 2003
Grant dateAug 2, 2005
Priority date
Expiry dateApr 16, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/365
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A microscope apparatus has a sample table for supporting a sample and being mounted to undergo movement in a horizontal direction. A line sensor acquires a line image for each of a series of measuring positions of the sample in accordance with movement of the sample at a constant speed by one measuring width of the line sensor in the horizontal direction. An image processing device produces an image of the sample based on the line images acquired by the line sensor. A focusing device has a light-projecting member for projecting light onto the sample at a position forward of a leading side of an imaging range of the line sensor in the horizontal direction to prevent light reflected by the sample as a result of the projected light from being incident on and interfering with the line images acquired by the line sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.