Micromachined devices with apertures
US6925877B2 · kind B2 · utility
3Cited by
33References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2003 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Apr 1, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.