Capacitive differential pressure sensor

US6925884B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Frank Hegner · Bad Kötzting, DE
• Ulfert Drewes · Bad Hersfeld, DE
• Andreas Rossberg · Bad Säckingen, DE
• Elke Schmidt · Bad Säckingen, DE

Key dates

• Filing date: Apr 4, 2002
• Grant date: Aug 9, 2005
• Expiry date: Apr 4, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L13/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.