Arc-coating process with rotating cathodes
US6926811B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2003 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Aug 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method is provided for coating objects in a vacuum chamber in which a physical vapor deposition (PVD) can be carried out. The chamber has at least one anode means, at least one cathode and at least one magnetic field source. An arc can be ignited between the at least one anode means and the at least one cathode, and the cathode separates material. The at least one magnetic field can be turned relative to the at least one cathode and the objects to be coated are arranged in the chamber. The magnetic field is turned before the beginning of the coating process so that the separated material does not coat the objects to be coated in the coating process. The arc for the physical deposition process is produced by means of at least two cathodes, said cathodes are constructed as substantially cylindrical tubular cathodes and the at least one magnetic field source is constructed as a permanent or coil magnet arranged in the tubular cathodes and the tubular-cathodes turn about their cylinder axis during the coating process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.