Optical excitation/detection device and method for making same using fluidic self-assembly techniques
US6927382B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2002 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Jun 19, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/12043
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The disclosure is directed toward an optical excitation/detection device that includes an arrayed plurality of photodetectors and separately formed photoemitters, as well as a method for making such a device. A CMOS fabricated photodetector array including a plurality of individual photoreceptors is selectively etched back between photoreceptor locations to reveal a plurality of recessed regions having a certain geographic profile. A plurality of semiconductor blocks, each having light emitting capability and each having a certain geometric profile that is complementary in size and shape to the certain geometric profile of the recessed regions, are separately fabricated. These blocks are included within a fluid to form a slurry. The slurry is then flowed over the CMOS fabricated photodetector array in accordance with a fluidic self-assembly technique, and the included semiconductor blocks are individually deposited within each of the plurality of recessed regions in the CMOS fabricated photodetector array. The deposited blocks are then attached within the recessed regions to form the optical excitation/detection device from an arrayed plurality of photodetectors and separately form…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.