Acoustic resonator devices having multiple resonant frequencies and methods of making the same
US6927651B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2003 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | May 12, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/172
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices having multiple resonant frequencies and methods of making the same are described. In one aspect, an acoustic resonator device includes an acoustic resonant structure that includes first and second electrodes and first and second piezoelectric layers. The first and second electrodes abut opposite sides of a resonant volume free of any interposing electrodes. The first and second piezoelectric layers are disposed for acoustic vibrations in the resonant volume and have different respective acoustical resonance characteristics and respective piezoelectric axes oriented in different directions. The acoustic resonant structure has resonant electric responses at first and second resonant frequencies respectively determined at least in part by the acoustical resonance characteristics of the first and second piezoelectric layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.