Patent · US Expired

Method and system for determining dimensions of optically recognizable features

US6927864B2 · kind B2 · utility

7Cited by
8References
23Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 5, 2002
Grant dateAug 9, 2005
Priority date—
Expiry dateJul 15, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/0608
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and system for determining dimensions of optically recognizable features provides a low-cost and efficient high speed/high resolution measurement system for determining surface feature dimensions. Multiple imaging subsystems are arranged at predetermined differing angles above a surface under test. A scanning subsystem moves either the imaging subsystems or the surface under test and a processor coupled to the imaging subsystems determines the height of a surface feature by determining the deviations between the outputs of the imaging systems as an edge of the surface feature passes within the optical paths of the imaging subsystems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.