Vertical-color-filter detector group with trench isolation
US6930336B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 17, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Jun 25, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/1825
Abstract
A vertical-color-filter detector group comprises a semiconductor body including a plurality of alternating silicon layers of first and second conductivity types, the second conductivity type being opposite that of the first conductivity type, formed over a substrate of the first conductivity type. Each of the layers of the second conductivity type are disposed at a depth from an upper surface of the silicon body selected to preferentially absorb radiation of a selected color, there being at least first and second layers of the second conductivity type. First and second conductive contacts extend, respectively, from the first and second layers of the second conductivity type to the upper surface of the silicon body. A peripheral isolation trench defines a perimeter of the detector group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.