Storage capacitor of planar display and fabrication method of same
US6930372B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Aug 29, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/85
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A storage capacitor structure of a planar display is disclosed. The storage capacitor includes a substrate, a bottom electrode, an insulator, and a top electrode. The bottom electrode or top electrode has an uneven surface toward the insulator interposed between the two electrodes in order to increase the capacitance of the storage capacitor structure. A method for fabricating such storage capacitor structure is also disclosed. It includes steps of providing a substrate; and forming a bottom electrode, an insulator, and a top electrode in sequence. The bottom electrode or the top electrode has the uneven surface by an etching step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.