High resolution scanning magnetic microscope operable at high temperature
US6930479B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Mar 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0385
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning magnetic microscope (SMM) (20) includes a current source (27) for imposing an excitation current to a conductor-under-test (CUT) (70) and, if applicable, a reference current to a proximally located reference conductor (72). During accelerated testing, the SMM (20) corrects thermal drift of the CUT (70) via the reference conductor (72). A sensor (21) may be cooled by a heat sink (31) such as a pump (33) directing an airstream or a coldfinger (80). The sensor may switch from a contact to a non-contact mode of scanning the CUT (70). The SMM (20) and methods are useful for measuring electromigration in a CUT (70) as it occurs, for assembling the images into time lapsed representations such as a shape of the CUT (70), for measuring electromigration as a function of a cross sectional area of a wire under a dielectric material (DM) (78), for determining electrical parameters of the CUT (70), and for optimizing a thickness of a DM (78) over a CUT (70). The SMM (20) and methods are further useful for measuring morphological changes in a CUT (70) due to other stressing conditions, such as temperature, excitation current, physical stress(es), hostile environment, aging, semiconduct…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.