Micromechanical resonator having short support beams
US6930569B2 · kind B2 · utility
38Cited by
7References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Aug 28, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02511
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The illustrative embodiment of the present invention is a vertical-mode, free-free beam resonator, and micromechanical circuits that include one or more such resonators. In accordance with the illustrative embodiment, the resonator comprises a movable beam that overlies a drive electrode. The movable beam is supported by a plurality of supports, the length of which is substantially less than one-quarter of a wavelength of the resonant frequency of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.