MEMS optical switches with guaranteed switching status
US6931173B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Feb 11, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04Q2011/0083
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
Techniques for controlling and monitoring MEMS optical switches are disclosed. In one embodiment, an electronic feedback loop is employed to determine a control signal to a MEMS switch actuator in accordance with an instruction. The control signal is so determined in such a way that the switching statuses are maximally guaranteed. To generate an appropriate control signal, AC or DC impedances of the MEMS switch are detected and used to configure the control signal to drive the switch. When it is detected that the impedance changes do not meet respective thresholds, the control signal is adjusted. In the case that the stiction happens, the switch actuator is overcharged, discharged and repeatedly applied for a limited time to overcome the stiction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.