Patent · US Expired

Method of producing a surface wave component with a drain for pyroelectric voltage

US6931699B2 · kind B2 · utility

3Cited by

6References

20Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Wolfgang Pahl · Munich, DE
Heiner Bayer · Olching, DE

Key dates

Filing date	Dec 20, 2000
Grant date	Aug 23, 2005
Priority date	—
Expiry date	Jul 27, 2021

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49155
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A method of producing a surface wave component with a drain for pyroelectric voltage includes forming electrically-conductive structures on a piezoelectric substrate. The structures form an acoustic path comprising an electroacoustic transducer. The method also includes forming a high-resistance layer on an entire surface of the substrate and on top of the electrically-conductive structures, and removing the high-resistance layer from at least a region corresponding to the electroacoustic transducer, such that at least a region outside the acoustic path remains covered by the high-resistance layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.