Patent · US Expired

Interferometric measuring device

US6934027B2 · kind B2 · utility

2Cited by

8References

24Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Friedrich Prinzhausen · Stuttgart, DE
Michael Lindner · Leutenbach, DE
Vincent Thominet · Morges, FR

Key dates

Filing date	Jul 6, 2001
Grant date	Aug 23, 2005
Priority date	—
Expiry date	Nov 22, 2022

Classification

Technology area (CPC A)Human Necessities
CPC primaryA61B1/00165
WIPO fieldMedical technology
WIPO sectorInstruments

Abstract

An interferometric measuring device for measuring the shape of a surface of an object having a radiation source which emits a short-coherent radiation, a beam splitter for forming an object beam which is directed via an object light path to the object, and a reference beam which is directed via a reference light path to a reflective reference plane, and having an image converter which picks up the radiation reflected back by the surface and the reference plane and brought to interference, and sends it to an analyzing device for determining a measuring result pertaining to the surface, the optical length of the object light path being changed relative to the optical length of the reference light path for analyzing the interference peak.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.