Coating method and apparatus
US6936145B2 · kind B2 · utility
8Cited by
24References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Jan 22, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32577
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus used for the application of plating/coating in a cathodic arc process to improve coating uniformity, deposition rates, quality, cost, packaging, arc triggering, target wear and other improvements is described in the patent. The process improvements utilize a cathode with external current switching to two or more electrical cathode contacts, employment of magnets on the backside of the cathode, a non-mechanical arc initiation trigger, patterned target surfaces, adjustable cathode insulation, current modulation, and new packaging schemes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.