Oscillatory type pressure sensor
US6938489B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 20, 2003 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Feb 1, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0017
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detect…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.