High fidelity electrical probe
US6940298B2 · kind B2 · utility
4Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2002 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Jan 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe assembly for use with a calibration/validation robot to calibrate/validate a plurality of semiconductor tester channels is disclosed. The probe assembly includes a bracket adapted for mounting to the robot and a probe element for engaging test points disposed on the semiconductor tester channels. A magnetic attach/release mechanism cooperates with the bracket and probe element to allow for the separation of the probe element from the bracket whenever the probe element meets a force that exceeds a predetermined value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.