Inspection status display method
US6940527B2 · kind B2 · utility
2Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2003 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Jun 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of this invention is to confirm the content of a defect in real time. A defect image, corresponding master pattern image, failure designation button, nondefective designation button, dust designation button, piece number, piece coordinates, and the type of defect are displayed within a defect image region in an inspection status display window. When the nondefective designation button or dust designation button is selected, the inspecting apparatus recognizes that a defect corresponding to the selected button is negligible, and changes the inspection result of this defect from the defect to a nondefective.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.