Optical measuring device
US6940610B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2002 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Oct 13, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0028
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG. 1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.