Patent · US Expired

Optical measuring device

US6940610B2 · kind B2 · utility

9Cited by
10References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 14, 2002
Grant dateSep 6, 2005
Priority date
Expiry dateOct 13, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/0028
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG. 1).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.