Diffraction optical element and transfer mold therefor
US6940650B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2003 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Apr 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A diffraction optical element including an element body having a large number of grooves formed on its surface to form a grating, and a grating shape adjusting layer deposited on a grating surface of the element body by oblique incidence or material particles onto the grating surface, wherein the grating shape adjusting layer per se is made of a reflecting film material. By the grating shape adjusting layer, the contour shape of the resulting grating surface in a section perpendicular to a lengthwise direction of the grooves is made not similar to the sectional shape of the element body. A reflecting film may be formed on a grating shape adjusting layer made of another material. A reflecting film may be provided on the element body before a grating shape adjusting layer made of a transparent dielectric material is provided on the reflecting film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.