Patent · US Expired

Vacuum coating apparatus

US6942768B2 · kind B2 · utility

0Cited by

5References

8Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Wolfgang Erbkamm · Dresden, DE
Hans Hecht · Stuttgart, DE
Michael Hofmann · Taufkirchen, DE
Falk Milde · Dresden, DE

Key dates

Filing date	Sep 27, 2002
Grant date	Sep 13, 2005
Priority date	—
Expiry date	Sep 27, 2022

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/568
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.