Ultraclean fluoroelastomer suitable for use in the manufacturing of electronic components

US6943228B2 · kind B2 · utility

Assignee

• 3M INNOVATIVE PROPERTIES COMPANY · US

Inventors

• Werner M. A. Grootaert · Windom, US
• Klaus Hintzer · Woodbury, US
• Bernhard Hirsch · Altötting, DE
• Harald Kaspar · Altötting, DE
• Robert E. Kolb · Afton, US
• Gernot Lohr · Altötting, DE
• Werner Schwertfeger · Altötting, DE

Key dates

• Filing date: Jul 25, 2003
• Grant date: Sep 13, 2005
• Expiry date: Jul 25, 2023

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08F214/184
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

A curable fluoroelastomer composition for preparing a perfluoroelastomer. The composition includes; (1) a perfluoropolymer having one or more cure-sites selected from a halogen capable of participating in peroxide cure reaction and/or nitrile groups; (2) an organic peroxide and/or a compound capable of effecting curing of the perfluoropolymer through said nitrile groups; and (3) optionally a polyunsaturated coagent. The perfluoropolymer in the composition is essentially free of ionic end groups and the total amount of metal cations in the composition is not more than 10 μg/g perfluoropolymer. The perfluoroelastomers may be obtained from curing the composition in a sufficiently low amount of metal cations so as to make the fluoroelastomer suitable for use in the semi-conductor industry.