Tunable piezoelectric micro-mechanical resonator
US6943484B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2002 |
| Grant date | Sep 13, 2005 |
| Priority date | — |
| Expiry date | Jul 20, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
One aspect of the invention relates to a composite member for a resonator having an active piezoelectric element and a passive piezoelectric element. The active piezoelectric element causes the resonator to vibrate and detects the frequency of the vibration. The passive piezoelectric element changes the frequency of the vibration. Another aspect of the invention relates to a method for controlling a resonator with composite member having a substrate carrying a composite piezoelectric element. The composite piezoelectric element includes an actuator element, a sensor element and a passive element. The method comprises inducing a resonance within the composite member with the actuator element, detecting the resonance with the sensor element, and altering the resonance by altering the electromechanical coupling of the passive element. Additional aspects and benefits of the invention are also given.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.