Compact interferometer and use in wavelength monitoring
US6943890B2 · kind B2 · utility
0Cited by
7References
33Claims
0Family size
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Key dates
| Filing date | Sep 5, 2002 |
| Grant date | Sep 13, 2005 |
| Priority date | — |
| Expiry date | Jun 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/0246
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A compact interferometer includes a substrate having opposing faces and a suppression feature on one of the faces of the substrate. The suppression feature suppresses higher order reflections inside the substrate. The suppression feature may be an absorptive coating. The interferometer produces high throughput, high contrast signals when receiving light at normal or near normal incidence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.