Interferometric measuring device

US6943895B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Friedrich Prinzhausen · Stuttgart, DE
• Michael Lindner · Leutenbach, DE

Key dates

• Filing date: Mar 29, 2001
• Grant date: Sep 13, 2005
• Expiry date: Sep 12, 2021

Classification

• Technology area (CPC A): Human Necessities
• CPC primary: A61B5/0084
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

The interferometric measuring device (1) for measuring the shape of a surface of an object (O) has a radiation source (LQ), a beam splitter (ST) producing an object beam (OS) guided along an object light path to the object (O) and a reference beam (RS) guided along a reference light path to a reflective reference plane (RSP), an image recorder (BA) that records interfering radiation reflected by the object (O) and the reference plane (RSP) and an associated evaluation device (E) to determine the surface shape. A favorable adaptability and operation are achieved by arrangement of a fixed lens system (SO) that produces a fixed intermediate image (SZB) in the object light path and a movable lens system (BO) that is movable in a direction of its optical axis for depth scanning. The image recorder (BA) has pixels arranged next to each other on an extended planar surface.